点击图片查看原图portant; word-break: break-all !important; overflow-wrap: break-word !important; max-width: 726px !important;">测量原理
portant; word-break: break-all !important; overflow-wrap: break-word !important; max-width: 726px !important;">测量基准
portant; word-break: break-all !important; overflow-wrap: break-word !important; max-width: 726px !important;">海德汉光学扫描的直线光栅尺或编码器的测量基准都是周期刻线－光栅
portant; word-break: break-all !important; overflow-wrap: break-word !important; max-width: 726px !important;">这些光栅刻在玻璃或钢材基体上 ，对于大长度的光栅尺，用钢带作为光栅尺基体 ， 海德汉公司用以下特别开发的光刻工艺制造***光栅 ，
portant; word-break: break-all !important; overflow-wrap: break-word !important; max-width: 726px !important;">? AURODUR：在镀金钢尺带上蚀刻栅线；典型栅距：40 ?m ，
portant; word-break: break-all !important; overflow-wrap: break-word !important; max-width: 726px !important;">? metaLLUR：抗污染的镀金层金属栅线；典型栅距：20 μm ，
portant; word-break: break-all !important; overflow-wrap: break-word !important; max-width: 726px !important;">? DIADUR：玻璃基体上超硬铬线（典型栅距：20 μm）或玻璃基体上三维铬线格栅（典型栅距：8 μm） ，
portant; word-break: break-all !important; overflow-wrap: break-word !important; max-width: 726px !important;">? SUPRADUR相位光栅：光学三维平面格栅；抗污能力；典型栅距：不超过8 μm ，
portant; word-break: break-all !important; overflow-wrap: break-word !important; max-width: 726px !important;">? OPTODUR相位光栅：光学三维平面格栅，***反光性能；典型栅距：不超过2 μm ，
portant; word-break: break-all !important; overflow-wrap: break-word !important; max-width: 726px !important;">除极小栅距外，由该工艺刻制的光栅拥有***的边缘清晰度和均匀性 ，结合光电扫描法，边缘清晰的刻线是输出高质量信号的关键 ， 母版光栅采用海德汉公司定制的***刻线机制造
portant; word-break: break-all !important; overflow-wrap: break-word !important; max-width: 726px !important;">光电扫描
portant; word-break: break-all !important; overflow-wrap: break-word !important; max-width: 726px !important;">海德汉的大多数光栅尺采用光电扫描原理，光电扫描在工作中无接触，因此无磨损 ，光电扫描可以检测到非常细小的光栅，栅线宽度可仅数微米，并能输出非常细小的信号周期信号 ，测量基准的栅距越小，光电扫描的衍射现象越严重 ，海德汉直线光栅尺采用两种扫描原理：
portant; word-break: break-all !important; overflow-wrap: break-word !important; max-width: 726px !important;">? 成像扫描原理用于20 ?m至大约40 ?m的栅距 ，
portant; word-break: break-all !important; overflow-wrap: break-word !important; max-width: 726px !important;">? 干涉扫描原理用于更小栅距的光栅，例如，8 ?m
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